Citation
Abstract
The surface resistance of niobium nitride (NbN) thin films has been measured at 7.78 and 10,14 GHz in the temperature range of 1.5 to 4.2 K. The films were reactively sputtered on sapphire substrates to a thickness of approximately 1 micron. The surface resistance was determined by measuring the quality factor (Q) of the TE9,, mode of a lead-plated copper cavity where the NbN served as one end-cap of the cavity.
Details
- Volume
- 42-88
- Published
- February 15, 1987
- Pages
- 24–28
- File Size
- 343.6 KB